Principles and Applications of NanoMEMS Physics ILO Sicherung der langfristigen Existenz des
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Principles and Applications of NanoMEMS Physics ILO Sicherung der langfristigen Existenz desPrinciples and Applications of NanoMEMS Physics presents the first unified exposition of the physical principles at the heart of NanoMEMS based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of nanotechnology and MEMS fabrication techniques, the book addresses the physics germane to this dimensional regime, namely, quantum wave particle phenomena, including, the
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